A Guide to Hands-on MEMS Design and Prototyping

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design this practical guide provides the hands-on experience needed to design fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects as well as computer-aided design tools (layout modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed from fields including micro-mechanics electrostatics optical MEMS thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.