Control and Characterization of Line-Addressable Micromirror Arrays

<p>This research involved the design and implementation of a complete line addressable control system for a 32x32 electrostatic piston-actuated micromirror array device. Line addressing reduces the number of control lines from N2 to 2N making it possible to design larger arrays and arrays with smaller element sizes. The system utilizes the electromechanical bi-stability of individual elements to hold arbitrary bistable phase patterns a technique previously used on tilt arrays. The control system applies pulse width modulated (PWM) signals to the rows and columns of the device to generate a static phase pattern across the array. Three modes of operation were considered and built into the system. The first was the traditional signal scheme which requires the array to be reset before a new pattern can be applied. The second is an original scheme that allows dynamic switching between bi-stable patterns. The third and final mode applies an effective voltage ramp across the device by operating above mechanical cutoff. Device characterization and control system testing were conducted on samples from two different foundry processes.</p><p>This work has been selected by scholars as being culturally important and is part of the knowledge base of civilization as we know it. This work was reproduced from the original artifact and remains as true to the original work as possible. Therefore you will see the original copyright references library stamps (as most of these works have been housed in our most important libraries around the world) and other notations in the work.</p><p>This work is in the public domain in the United States of America and possibly other nations. Within the United States you may freely copy and distribute this work as no entity (individual or corporate) has a copyright on the body of the work.</p><p>As a reproduction of a historical artifact this work may contain missing or blurred pages poor pictures errant marks etc. Scholars believe and we concur that this work is important enough to be preserved reproduced and made generally available to the public. We appreciate your support of the preservation process and thank you for being an important part of keeping this knowledge alive and relevant.</p>