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English
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About The Book
Description
Author
This book is the first to give a comprehensive review of the theory fabrication characterisation and device applications of abrupt shallow and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology.
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Details
ISBN 13
9780521017961
Publication Date
-25-08-2005
Pages
-620
Weight
-1106 grams
Dimensions
-188.98x246.13x32.45 mm
