Design and Simulation of RF MEMS Switched Parallel Plate Capacitors

In wireless communication systems passive elements like tunable capacitors are needed in a variety of applications such as Voltage Controlled Oscilla- tors (VCO) tunable matching networks and filters. In this books the design and modeling of a Switched RF-MEMS parallel plate (air-gap) capacitor is presented. The feasibility of realizing switched RF MEMS capacitors in some technology constrains is considered with a targeted specifications given prior to design such as: low actuation voltage (<3 Volts) capacitance ratio of 20 upstate capacitance of 20fF and electrical quality factor of 100. The design of low stiffness suspensions to achieve the low actuation voltage is discussed in detail.