Electromechanics and MEMS (South Asia Edition)

Offering a consistent systematic approach to capacitive piezoelectric and magnetic MEMS from basic electromechanical transducers to high-level models for sensors and actuators this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs such as electrical circuits electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems all designed to test and extend students understanding of the key principles.