Materials Processing by Cluster Ion Beams

<p><strong>Materials Processing by Cluster Ion Beams: History Technology and Applications</strong> discusses the contemporary physics materials science surface engineering issues and nanotechnology capabilities of cluster beam processing. </p><p></p><p>Written by the originator of the gas cluster ion beam (GCIB) concept this book:</p><p></p><ul> <br><br><li>Offers an overview of ion beam technologies from the discovery of monomer ions to the introduction of GCIBs</li> <br><br><li>Explores the development of sources for producing cluster beams from solid materials</li> <br><br><li>Describes the engineering characteristics of gas cluster ion beam equipment</li> <br><br><li>Covers cluster ion-solid surface interaction kinetics as well as sputtering implantation and ion-assisted deposition</li> <br><br><li>Details surface processing techniques for smoothing shallow implantation and preparation of high-quality thin films</li> <br><br><li>Introduces representative examples of emerging GCIB industrial applications</li> </ul><p></p><p><b>Materials Processing by Cluster Ion Beams: History Technology and Applications </b>provides a deeper understanding of the importance of cluster ion beams and their applications.</p>