MEMS Packaging Technologies and 3D Integration


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Details

ISBN 13
:
9783036542584
Publication Date
:
01-06-2022
Pages
:
210
Weight
:
452 grams
Dimensions
:
170x244x17.46 mm
Publisher

About The Book

This Special Issue introduces recent research results on MEMS packaging and 3D integration whose subjects can be divided as follow; three papers on biocompatible implantable packaging three papers on interconnect three papers on bonding technologies one paper on vacuum packaging and three papers on modeling and simulation.
downArrow

Details

ISBN 13
:
9783036542584
Publication Date
:
01-06-2022
Pages
:
210
Weight
:
452 grams
Dimensions
:
170x244x17.46 mm
Publisher