MEMS/NEMS Sensors: Fabrication and Application

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes the MEMS/NEMS devices transduce physical parameter changes such as temperature mass or stress caused by changes in desired measurands to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors accelerometers magnetic field sensors microphones radiation sensors and particulate matter sensors.