Micro-electronic Processes for VLSI Fabrication

Micro-electronic Processes for VLSI Fabrication is a comprehensive and authoritative guide that delves into the fundamental principles and advanced techniques used in the fabrication of Very Large Scale Integrated (VLSI) circuits. Covering a wide array of topics the book begins with an in-depth introduction to Silicon Semiconductor Technology including an overview of semiconductor materials the crystal structure of silicon intrinsic and extrinsic semiconductors and the intricacies of doping and ...See More