Microengineering MEMS and Interfacing

Designed to address particular problems across a range of disciplines Microengineering MEMS and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials including silicon metals and polymers and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering introduces the subject of sensor interfacing and raises the tricky subject of MEMS packaging.