Optical MEMS Nanophotonics and Their Applications

<p>This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems.</p><ul> <li>Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration.</li> <li>Showcases the integration of MEMS and optical/photonic devices into real commercial products.</li> <li>Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems.</li> </ul><p><strong>Prof. Vincent C. Lee</strong> is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore.</p><p><strong>Prof. Guangya Zhou</strong> is Associate Professor in the Department of Mechanical Engineering at National University of Singapore. </p> <p><strong>Section I Optical MEMS for communication, imaging, and sensing applications</strong></p><p>1 Optical MEMS: An introduction</p><p>Guangya Zhou and Chengkuo Lee</p><p>2 MEMS optical scanners for laser projection display</p><p>Hiroshi Toshiyoshi</p><p>3 Optical micro-electrical-mechanical phased array</p><p>Youmin Wang and Ming-Chiang Wu</p><p>4 Optical MEMS for space: Design, characterization, and applications</p><p>Frederic Zamkotsian</p><p>5 MEMS vibratory grating scanners and their applications</p><p>Guangya Zhou</p><p>6 F–P filters and applications in spectrometers and gas sensing</p><p>Chong Pei Ho and Chengkuo Lee</p><p>7 Electrothermally actuated MEMS mirrors: Design, modeling, and applications</p><p>Huikai Xie, Xiaoyang Zhang, Liang Zhou, and Sagnik Pal</p><p>8 MEMS tunable optics: Liquid and solid methods</p><p>Yongchao Zou and Guangya Zhou</p><p>Section II Nanophotonics for communication, imaging, and sensing applications</p><p>9 Physical sensors based on photonic crystals</p><p>Bo Li and Chengkuo Lee</p><p>10 Silicon photonic variable waveguide coupler devices</p><p>Kazuhiro Hane</p><p>11 Metasurface and ultrathin optical devices</p><p>Xianzhong Chen, Dandan Wen, and Fuyong Yue</p><p>12 Optical micro- and nanoresonators for biochemical sensing</p><p>Xingwang Zhang, Liying Liu, Lei Xu, Xudong Fan, and Guangya Zhou</p><p>13 Terahertz MEMS metamaterials</p><p>Prakash Pitchappa and Chengkuo Lee</p><p>Section III Biomicro- and nanophotonics and optofluidics for health care applications</p><p>14 Optofluidic devices and their applications</p><p>Sung-Yong Park</p><p>15 Implantable CMOS microphotonic devices</p><p>Jun Ohta and Takashi Tokuda</p><p>16 Microfluidic photocatalysis</p><p>Ning Wang and Xuming Zhang</p>