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About The Book
Description
Author
<p>This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology physical design optimizations such as placement and redundant via insertion and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.</p>
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Details
ISBN 13
9783319762937
Publication Date
-03-04-2018
Pages
-152
Weight
-331 grams
Dimensions
-156x234x11.11 mm
