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About The Book
Description
Author
<p>This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas and relevant specialties. </p>
Piracy-free
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Details
ISBN 13
9780367571627
Publication Date
-30-06-2020
Pages
-342
Weight
-487 grams
Dimensions
-156x234x18.17 mm
Imprint
-TAYLOR AND FRANCIS GROUP
