Protein Impregnated Polymer Film Infrared Sensor Using Suspended Microelectromechanical Systems Pixels

<p>The Air Force Research Laboratory Materials and Manufacturing Directorate have developed a novel protein impregnated polymer (PIP) suspension that changes resistivity as a function of absorbed infrared radiation. Due to this property the PIP is a potential material for use as an uncooled bolometer or thermal sensor. In this research a thermally-isolated pixel design sensor characterization methods and sensor fabrication and processing steps were developed. To create a microbolometer the PIP was applied to two prototype micro-electro-mechanical systems (MEMS) surface micro-machined structures. The first is a raised cantilever pixel array that uses residual stress polysilicon and metal film arms to bend the pixels away from their substrate. The second is a suspended membrane pixel array in which the backside silicon wafer substrate is removed. The thermal sensor's figures of merit responsivity detectivity noise equivalent power noise equivalent temperature difference and thermal time constant were modeled. An attempt was made to evaluate the performance of the fabricated microbolometer pixels by comparing measured data to model predictions. This research shows the PIP material can be used to make a practical thermal sensor.</p><p>This work has been selected by scholars as being culturally important and is part of the knowledge base of civilization as we know it. This work was reproduced from the original artifact and remains as true to the original work as possible. Therefore you will see the original copyright references library stamps (as most of these works have been housed in our most important libraries around the world) and other notations in the work.</p><p>This work is in the public domain in the United States of America and possibly other nations. Within the United States you may freely copy and distribute this work as no entity (individual or corporate) has a copyright on the body of the work.</p><p>As a reproduction of a historical artifact this work may contain missing or blurred pages poor pictures errant marks etc. Scholars believe and we concur that this work is important enough to be preserved reproduced and made generally available to the public. We appreciate your support of the preservation process and thank you for being an important part of keeping this knowledge alive and relevant.</p>