RF MEMS Switches and Switch Circuits

The book presents the design and fabrication of RFMEMS switches and switch circuits. It presents RFMEMS capacitive switches and MEMS tunable filterfirst ever to be produced in Norway. Modeling anddesign of high speed switches and high capacitanceratio switches are presented. Design and simulationof tunable low pass and bandpass filters are alsodescribed. A model for pull down voltage of anon-uniform bridge and cantilever is alsohighlighted. The fabrication of the capacitiveswitches and MEMS tunable filters conducted in theSINTEF MiNa lab is described in details. Measurementsof pull down voltage and characterization of RFperformance for the switches and filters (low passand band pass) are also presented.