Run-to-Run Control in Semiconductor Manufacturing

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs thereby minimizing process drift shift and variability-and with them costs. Its effectiveness has been demonstrated in a variety of processes such as vapor phase epitaxy lithography and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.