Solid-State Physics Fluidics and Analytical Techniques in Micro- and Nanotechnology

Providing a clear theoretical understanding of MEMS and NEMS Solid-State Physics Fluidics and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it including solid-state physics. It provides a clear understanding of the electronic mechanical and optical properties of solids relied on in integrated circuits (ICs) MEMS and NEMS. After exploring the rise of Si MEMS and NEMS in a historical context the text discusses crystallography quantum mechanics ...See More