Zinc oxide thin film production by spray pyrolysis

In this work the development of several series of zinc oxide thin films by spray pyrolysis under different deposition conditions is demonstrated. The various techniques used (Profilometer X-ray Diffraction UV-Visible Spectrophotometry Cancellation Ellipsometer and the two-tip technique in a coplanar configuration) to study the structural optical and electrical properties of these films are also described (layer thicknesses grain size stresses refractive index bandgap width Urbach parameter electrical conductivity and activation energy). The films obtained are polycrystalline with a single hexagonal würtzite phase structure. Analysis of the transmittance spectra and the increase in conductivity with measuring temperature show that it is possible to obtain transparent semiconducting ZnO thin films.